Nanolithography and Nanofabrication
Veranstaltungstyp: Seminar (Lehre)
Ort: nicht angegeben
Semester: SoSe 2024
Veranstaltungsnummer: 534251
TeilnehmerInnen: Master students 1.-2. semester
Lernorganisation: Consultation appointments are arranged for the preparation of the lectures and for the selection of literature. Für die Vorbereitung der Vorträge und bei der Literaturauswahl werden Beratungstermine vereinbart.
Leistungsnachweis: →Ab hier automatisch erfasste Informationen / Beyond this point, the information is filled in automatically← Prüfungsleistung(en) je Modul / Exam details per module: * [(B.Phy.566.Mp) Seminar zu speziellen Themen der Biophysik/komplexen Systeme][1] * Vortrag: Mo, 30.09.2024 * [(M.MtL.1406.Mp) Research seminar Matter to Life][2] * Präsentation: Mo, 30.09.2024 * [(M.Phy.410.Mp) Research Seminar Biophysics/Physics of Complex Systems][3] * Vortrag: Mo, 30.09.2024 * [(M.Phy.413.Mp) General Seminar][4] * Vortrag: Mo, 30.09.2024 * [(M.Phy.566.Mp) Seminar Advanced Topics in Biophysics/Complex Systems][5] * Vortrag: Mo, 30.09.2024 * [(M.Phy.576.Mp) Seminar Advanced Topics in Solid State/Materials Physics][6] * Vortrag: Mo, 30.09.2024 [1]: https://ecampus.uni-goettingen.de/h1/pages/startFlow.xhtml?_flowId=detailView-flow&unitId=36644&periodId=272 [2]: https://ecampus.uni-goettingen.de/h1/pages/startFlow.xhtml?_flowId=detailView-flow&unitId=22458&periodId=272 [3]: https://ecampus.uni-goettingen.de/h1/pages/startFlow.xhtml?_flowId=detailView-flow&unitId=38088&periodId=272 [4]: https://ecampus.uni-goettingen.de/h1/pages/startFlow.xhtml?_flowId=detailView-flow&unitId=38289&periodId=272 [5]: https://ecampus.uni-goettingen.de/h1/pages/startFlow.xhtml?_flowId=detailView-flow&unitId=38113&periodId=272 [6]: https://ecampus.uni-goettingen.de/h1/pages/startFlow.xhtml?_flowId=detailView-flow&unitId=38176&periodId=272
Sonstiges: Der Termin für die Vorbesprechung und die Vortragstermine sind im StudIP zu finden.
The date for the preliminary discussion and the lecture dates can be found in StudIP.

Das Prüfungsdatum im FlexNow ist ein technischer Termin für das System.
The examination date in FlexNow is a technical date for the system.

Learning outcome, core skills:

Learning outcome: The seminar is devoted to modern techniques and applications of nano-lithography and nanofabrication. It covers the fundamental principles of e-beam lithography, focused ion beam lithography, clean room operation, structure transfer by reactive ion etching, wet etching, issues of mask fabrication, resist deposition, wafer bonding, and structure characterization.

The topics also includes nano-structuring by biomolecular self-assembly.

Beyond fundamental research, the seminar also addresses applications in technology and industry, including EUV lithography.

The seminar covers in particular fabrication of advanced photonic devices.

Participants with ongoing research in the clean room and lithography units of Fakultät für Physik are particularly welcome.

Core skills: Knowledge in the above subjects, integration of knowledge in applied physics, engineering, metrology and surface chemistry. Skills
Weitere Informationen aus Stud.IP zu dieser Veranstaltung
Heimatinstitut: Institut für Röntgenphysik
In Stud.IP angemeldete Teilnehmer: 5
Anzahl der Postings im Stud.IP-Forum: 2
Anzahl der Dokumente im Stud.IP-Downloadbereich: 4
Link zu Stud.IP